The AMC is short for Airborne Molecular Contaminants and, literally, the initial state is the gas phase.Gaseous pollutants that act like a single molecule, or chemical pollutants in the environment able to settle on the surface of the material to form monolayer films, are translated as "suspended molecular pollutants" or "gas-borne molecular pollutants".In short, AMC is a non-particle suspended chemical pollutant that has a adverse impact on a product or process equipment and its process.
The International Semiconductor Equipment and Materials Association classifies the AMC gases in SEMI F21-95, F21-1102.The standard applies to the clean environment of the semiconductor industry, and specifies four "standard ranges": acid (MA), alkali (MB), condensate (MC), and debris (MD).
Covering all AMC dangerous to products or processes, not only for semiconductor production but also for pharmaceutical production.
