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Description
In the clean room of semiconductor process, more AMC pollutants will escape, which will be deposited on the wafer and chip surface due to gravity or air flow, which will affect the product yield. When the inlet air volume cannot be changed, indoor microcirculation AMC pollutant treatment device is needed.
AMC pollutant control device can effectively control acid, alkali and organic matter.
Required air volume can be customized!
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